Benchmarks

Semiconductor Manufacturing: No Tresspassing

  • November 1998
  • By David Rotman
   

As computers get smaller and smaller, contamination becomes a bigger issue in manufacturing them. Even the vacuum chambers used in "clean rooms" aren't completely free of wayward particles-and even tiny particles can ruin an expensive set of silicon wafers.

Existing defenses against these trespassers aren't particularly sharp. They work by periodically checking the surfaces of silicon wafers for impurities. These methods are hit-and-miss, and they're helpless against particles smaller than two-tenths of a micrometer.

 

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